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Please directly refer to our paper:

Z. Wang, L. Li and Y. Yao, "A Machine Learning-Assisted Model for GaN Ohmic Contacts Regarding the Fabrication Processes," in IEEE Transactions on Electron Devices, vol. 68, no. 5, pp. 2212-2219, May 2021, doi: 10.1109/TED.2021.3063213.